Parkin et al. (Nature Materials 3, 862–867, 2004) reported sputter-deposited magnetic tunnel junctions with (100)-textured MgO barriers showing ~220% room-temperature tunnelling magnetoresistance (TMR), ~85% tunnelling spin polarization, and thermal stability to 400°C, and raised five issues for further study: the discrepancy between transport-derived barrier heights (~1.1–1.7 eV) and the ~3.5 eV valence-band offset from photoemission; the mechanism by which annealing enhances TMR and spin polarization; the absence of predicted MgO-thickness scaling of TMR; whether the very large TMR values predicted for ideal epitaxial barriers could be achieved in manufacturable sputtered stacks; and the quantitative relation between spectroscopically measured spin polarization and device TMR beyond the Jullière model. Three of these five issues have since been substantially resolved: room-temperature TMR of 604% (single barrier, 1144% at 5 K) and 1056% (double barrier) has been achieved in sputtered CoFeB/MgO stacks; oscillatory and monotonic MgO-thickness dependence has been observed in epitaxial and sputtered junctions; and the annealing mechanism (bcc CoFeB crystallization templated by MgO, boron segregation, interdiffusion control) is largely understood. The surviving open core is twofold: a quantitative microscopic census of defect states in sputtered MgO barriers that reconciles the low transport barrier heights with the photoemission band offset and accounts for their effect on TMR, and a predictive, quantitative theory connecting tunnelling spin polarization and TMR in real MgO junctions, including bias-dependent inelastic processes and finite-temperature magnon effects.
Background
A magnetic tunnel junction (MTJ) is a two-terminal device consisting of two ferromagnetic electrodes separated by a thin insulating tunnel barrier; its resistance depends on the relative magnetization orientation of the electrodes. The tunnelling magnetoresistance (TMR) is conventionally defined as , where and are the resistances in the antiparallel and parallel magnetic configurations. MTJs are the storage cell of magnetoresistive random-access memory (MRAM) and the read element of hard-disk sensors. The simplest theory, due to Jullière (1975), relates TMR to the spin polarizations of the two electrode–barrier interfaces as , treating the barrier as spin-neutral.
First-principles calculations by Butler, Zhang, Schulthess and MacLaren (2001) and by Mathon and Umerski (2001) predicted that perfectly ordered epitaxial Fe/MgO/Fe(001) junctions should show TMR of hundreds to thousands of percent: the crystalline MgO(001) barrier acts as a symmetry filter, transmitting the Bloch states of symmetry (and, with different efficiency, other symmetries) with strongly spin- and symmetry-dependent evanescent decay lengths, while amorphous alumina barriers of the pre-2004 era were limited to about 70% at room temperature. Simultaneous experiments then established the effect: Yuasa et al. (2004) achieved 180% at room temperature in fully epitaxial single-crystal Fe/MgO/Fe junctions, observing oscillations of TMR with barrier thickness that demonstrate coherent tunnelling, while Parkin et al. (2004) achieved ~220% at room temperature and ~300% at low temperature in sputter-deposited, industrially compatible polycrystalline stacks on amorphous underlayers, whose MgO barriers were nevertheless highly (100)-textured with CoFe electrodes.
Parkin et al. (2004) measured the tunnelling spin polarization (TSP) of their CoFe/MgO interfaces by superconducting tunnelling spectroscopy — a low-temperature technique in which a superconducting counterelectrode (there an Si-doped Al layer) analyzes the spin-resolved density of states of the tunnelling current — obtaining ~85% after annealing, then a record for conventional ferromagnetic metals. They extracted effective MgO barrier heights of ~1.1–1.7 eV by fitting current–voltage curves with the Simmons formula (a standard model for tunnelling through a rectangular barrier, which assumes free-electron-like carriers), whereas valence-band photoemission placed the MgO valence-band edge ~3.5 eV below the ferromagnet Fermi level. They also reported that annealing to ~350–425°C strongly increased both TMR and TSP, that TMR showed no pronounced dependence on MgO thickness, that the TMR fell to half its zero-bias value at bias voltages of ~0.3–0.6 V, and they posed five questions for further study: the microscopic nature, energy distribution and density of the defect states that reconcile the transport and photoemission barrier heights; the mechanism of the annealing enhancement; the reason the theoretically predicted MgO-thickness scaling of TMR was absent; whether the very large TMR predicted for ideal epitaxial barriers could be realized in manufacturable, thermally robust sputtered stacks; and the quantitative relation between spectroscopically measured TSP and device TMR, including bias-dependent inelastic processes, imperfect antiparallel alignment, and corrections to the Jullière estimate.
Subsequent work transformed the field. Sputtered CoFeB/MgO junctions — in which an amorphous CoFeB electrode is deposited first and crystallizes on annealing into bcc CoFeB epitaxially matched to the (001)-textured MgO, as established by Hayakawa et al. (2005, 2006), Lee et al. (2006), Ikeda et al. (2008) and microstructural studies such as Kodzuka et al. (2012) — became the industrial workhorse, enabling spin-transfer-torque MRAM (STT-MRAM). The theory of oxygen-vacancy (F center, i.e. an oxygen vacancy occupied by one or more electrons) defect states in MgO was developed by Velev et al. (2007), and defect-mediated resonant transport through MgO was demonstrated by Yang, Yang and Parkin (2007).
Problem Statement
Of the five issues raised by Parkin et al. (2004) on MgO(100)-barrier magnetic tunnel junctions, three have been substantially settled by later work (the realization of hundreds-of-percent room-temperature TMR in manufacturable, thermally robust sputtered stacks; the MgO-thickness dependence of TMR; and the mechanism of the annealing enhancement), leaving a precise surviving core that this problem states:
(1) Determine the microscopic defect population of sputtered, (100)-textured MgO tunnel barriers and quantify its transport consequences, establishing (1a) the atomic identity, energy distribution, and volume density of the defect states — such as oxygen vacancies (F centers), impurities, and grain-boundary states; (1b) a quantitative reconciliation of the low effective barrier heights extracted from transport (about 1.1–1.7 eV) with the valence-band offset of about 3.5 eV below the ferromagnet Fermi level found by photoemission; and (1c) a quantitative account of how these defects modify the resistance-area product and the bias dependence of TMR.
(2) Establish a quantitative, predictive relation between the tunnelling spin polarization measured by spectroscopy (superconducting tunnelling spectroscopy, spin-torque measurements) and the TMR of the corresponding MgO-barrier devices, going beyond the Jullière formula to capture the real-device effects it omits — such as bias-dependent inelastic processes (magnon- and phonon-assisted tunnelling), finite-temperature spin filtering, and imperfect antiparallel magnetic alignment — for realistic (textured, defect-bearing, annealed) MgO barriers, and to predict the achievable TMR magnitude of such devices.
References
- S. S. P. Parkin, C. Kaiser, A. Panchula, P. M. Rice, B. Hughes, M. Samant, S.-H. Yang (2004). Giant tunnelling magnetoresistance at room temperature with MgO (100) tunnel barriers. Nature Materials 3, 862–867. DOI 10.1038/nmat1256. https://doi.org/10.1038/nmat1256
- M. Julliere (1975). Tunneling between ferromagnetic films. Physics Letters A 54, 225–226. DOI 10.1016/0375-9601(75)90174-7. https://doi.org/10.1016/0375-9601(75)90174-7
- W. H. Butler, X.-G. Zhang, T. C. Schulthess, J. M. MacLaren (2001). Spin-dependent tunneling conductance of Fe|MgO|Fe sandwiches. Physical Review B 63, 054416. DOI 10.1103/PhysRevB.63.054416. https://doi.org/10.1103/PhysRevB.63.054416
- J. Mathon, A. Umerski (2001). Theory of tunneling magnetoresistance of an epitaxial Fe/MgO/Fe(001) junction. Physical Review B 63, 220403. DOI 10.1103/PhysRevB.63.220403. https://doi.org/10.1103/PhysRevB.63.220403
- S. Yuasa, T. Nagahama, A. Fukushima, Y. Suzuki, K. Ando (2004). Giant room-temperature magnetoresistance in single-crystal Fe/MgO/Fe magnetic tunnel junctions. Nature Materials 3, 868–871. DOI 10.1038/nmat1257. https://doi.org/10.1038/nmat1257
- D. D. Djayaprawira, K. Tsunekawa, M. Nagai, H. Maehara, S. Yamagata, N. Watanabe, S. Yuasa, Y. Suzuki, K. Ando (2005). 230% room-temperature magnetoresistance in CoFeB/MgO/CoFeB magnetic tunnel junctions. Applied Physics Letters 86, 092502. DOI 10.1063/1.1871344. https://doi.org/10.1063/1.1871344
- J. Hayakawa, S. Ikeda, F. Matsukura, H. Takahashi, H. Ohno (2005). Dependence of giant tunnel magnetoresistance of sputtered CoFeB/MgO/CoFeB magnetic tunnel junctions on MgO barrier thickness and annealing temperature. Japanese Journal of Applied Physics 44, L587. DOI 10.1143/jjap.44.l587. https://doi.org/10.1143/jjap.44.l587
- J. Hayakawa, S. Ikeda, Y. M. Lee, F. Matsukura, H. Ohno (2006). Effect of high annealing temperature on giant tunnel magnetoresistance ratio of CoFeB/MgO/CoFeB magnetic tunnel junctions. Applied Physics Letters 89, 232510. DOI 10.1063/1.2402904. https://doi.org/10.1063/1.2402904
- Y. M. Lee, J. Hayakawa, S. Ikeda, F. Matsukura, H. Ohno (2006). Giant tunnel magnetoresistance and high annealing stability in CoFeB/MgO/CoFeB magnetic tunnel junctions with synthetic pinned layer. Applied Physics Letters 89, 042506. DOI 10.1063/1.2234720. https://doi.org/10.1063/1.2234720
- G. D. Fuchs, J. A. Katine, S. I. Kiselev, D. Mauri, K. S. Wooley, D. C. Ralph, R. A. Buhrman (2006). Spin torque, tunnel-current spin polarization, and magnetoresistance in MgO magnetic tunnel junctions. Physical Review Letters 96, 186603. DOI 10.1103/PhysRevLett.96.186603. https://doi.org/10.1103/PhysRevLett.96.186603
- Y. S. Choi, Y. Nagamine, K. Tsunekawa, H. Maehara, D. D. Djayaprawira, S. Yuasa, K. Ando (2007). Effect of Ta getter on the quality of MgO tunnel barrier in the polycrystalline CoFeB/MgO/CoFeB magnetic tunnel junction. Applied Physics Letters 90, 012505. DOI 10.1063/1.2426902. https://doi.org/10.1063/1.2426902
- S. Yuasa, D. D. Djayaprawira (2007). Giant tunnel magnetoresistance in magnetic tunnel junctions with a crystalline MgO(001) barrier. Journal of Physics D: Applied Physics 40, R337–R354. DOI 10.1088/0022-3727/40/21/R01. https://doi.org/10.1088/0022-3727/40/21/R01
- R. Matsumoto, A. Fukushima, T. Nagahama, Y. Suzuki, K. Ando, S. Yuasa (2007). Oscillation of giant tunneling magnetoresistance with respect to tunneling barrier thickness in fully epitaxial Fe/MgO/Fe magnetic tunnel junctions. Applied Physics Letters 90, 252506. DOI 10.1063/1.2750398. https://doi.org/10.1063/1.2750398
- J. P. Velev, K. D. Belashchenko, S. S. Jaswal, E. Y. Tsymbal (2007). Effect of oxygen vacancies on spin-dependent tunneling in Fe/MgO/Fe magnetic tunnel junctions. Applied Physics Letters 90, 072502. DOI 10.1063/1.2643027. https://doi.org/10.1063/1.2643027
- H. Yang, S.-H. Yang, S. S. P. Parkin (2007). Crossover from Kondo-assisted suppression to co-tunneling enhancement of tunneling magnetoresistance via ferromagnetic nanodots in MgO tunnel barriers. Nano Letters 8, 340–344. DOI 10.1021/nl072930n. https://doi.org/10.1021/nl072930n
- M. Mizuguchi, Y. Suzuki, T. Nagahama, S. Yuasa (2007). In situ scanning tunneling microscopy observations of polycrystalline MgO(001) tunneling barriers grown on amorphous CoFeB electrode. Applied Physics Letters 91, 012507. DOI 10.1063/1.2754372. https://doi.org/10.1063/1.2754372
- S. Ikeda, J. Hayakawa, Y. Ashizawa, Y. M. Lee, K. Miura, H. Hasegawa, M. Tsunoda, F. Matsukura, H. Ohno (2008). Tunnel magnetoresistance of 604% at 300K by suppression of Ta diffusion in CoFeB/MgO/CoFeB pseudo-spin-valves annealed at high temperature. Applied Physics Letters 93, 082508. DOI 10.1063/1.2976435. https://doi.org/10.1063/1.2976435
- S. G. Wang, R. C. C. Ward, G. X. Du, X. F. Han, C. Wang, A. Kohn (2008). Temperature dependence of giant tunneling magnetoresistance in epitaxial Fe/MgO/Fe magnetic tunnel junctions. Physical Review B 78, 180411. DOI 10.1103/PhysRevB.78.180411. https://doi.org/10.1103/PhysRevB.78.180411
- L. Jiang, H. Naganuma, M. Oogane, Y. Ando (2009). Large tunnel magnetoresistance of 1056% at room temperature in MgO based double barrier magnetic tunnel junction. Applied Physics Express 2, 083002. DOI 10.1143/apex.2.083002. https://doi.org/10.1143/apex.2.083002
- S. Ikeda, K. Miura, H. Yamamoto, K. Mizunuma, H. D. Gan, M. Endo, S. Kanai, J. Hayakawa, F. Matsukura, H. Ohno (2010). A perpendicular-anisotropy CoFeB–MgO magnetic tunnel junction. Nature Materials 9, 721–724. DOI 10.1038/nmat2804. https://doi.org/10.1038/nmat2804
- M. Kodzuka, T. Ohkubo, K. Hono, S. Ikeda, H. D. Gan, H. Ohno (2012). Effects of boron composition on tunneling magnetoresistance ratio and microstructure of CoFeB/MgO/CoFeB pseudo-spin-valve magnetic tunnel junctions. Journal of Applied Physics 111, 043913. DOI 10.1063/1.3688039. https://doi.org/10.1063/1.3688039
- T. Scheike, Q. Xiang, Z. Wen, H. Sukegawa, T. Ohkubo, K. Hono, S. Mitani (2021). Exceeding 400% tunnel magnetoresistance at room temperature in epitaxial Fe/MgO/Fe(001) spin-valve-type magnetic tunnel junctions. Applied Physics Letters 118, 042411. DOI 10.1063/5.0037972. https://doi.org/10.1063/5.0037972